| p-stop | p-spray | Wafer |
BZ2 | BZ3 | BZ5 | MD |
|---|---|---|---|---|---|---|
| 35 | 1 | 2 | 1 | 1 | ||
| 31 | 1 | 2 | 1 | 1 | ||
| 25 | 1 | 1 | 1 | |||
| 01 | 1 | 1 | 1 |
| p-stop | p-spray | Wafer | BZ5 | BZ6 | MD |
|---|---|---|---|---|---|
| 02 | 4 | ||||
| 2E12 | 2E12 | 11 | 1 | ||
| 2E12 | 23 | 2 | 4 | ||
| 2E12 | 25 | 2 | |||
| 4E12 | 32 | 1 | 1 | 4 | |
| 4E12 | 33 | 1 | 1 | ||
| 42 | 4 | ||||
| 2.00E+12 | 43 | 1 | |||
| 44 | 4 | ||||
| 2E12 | 2E12 | 46 | 1 | 2 | |
| 8.00E+012 | 2.00E+12 | 47 | 1 |
| p-stop | p-spray | Wafer | BZ1 | BZ2 | BZ3 | BZ4 | BZ5 | MD | TS |
|---|---|---|---|---|---|---|---|---|---|
| 2E12 | 2E12 | 09 | 6 | 1 | 4 | 13 | 2 | ||
| 2E12 | 2E12 | 10 | 1 | ||||||
| 2E12 | 2E12 | 11 | 2 | 6 | 8 | 3 | 13 | 2 | |
| 4E12 | 22 | 4 | 1 | ||||||
| 1E13 | 42 | 2 | |||||||
| 2E13 | 46 | 2 | |||||||
| 2E13 | 49 | 1 |
| FZ | p-stop | p-spray | Wafer | BZ2, BZ3, BZ4 | BZ5, BZ6 | MD | TS |
|---|---|---|---|---|---|---|---|
| FZ1 | 4.00E+012 | 52 | 2 | ||||
| FZ1 | 4.00E+012 | 53 | 6 | ||||
| FZ1 | 1.00E+013 | 72 | |||||
| FZ1 | 1.00E+013 | 73 | 6 | ||||
| FZ1 | 2.00E+012 | 104 | 4 | 4 | |||
| FZ1 | 2.00E+012 | 107 | 10 | 4 | |||
| FZ2 | 1.00E+013 | 146 | |||||
| FZ2 | 1.00E+013 | 148 | 4 | ||||
| FZ2 | 1.00E+013 | 150 | 3 | ||||
| FZ2 | 2.00E+012 | 154 | 3 | ||||
| FZ2 | 2.00E+012 | 157 | 10 | 7 | |||
| FZ2 | 2.00E+012 | 158 | 14 | 5 | |||
| FZ2 | 4.00E+012 | 181 | 7 | 2 | |||
| FZ2 | 1.00E+013 | 184 | 9 | 5 | |||
| FZ2 | 2.00E+012 | 193 | 14 | 3 | |||
| FZ2 | 4.00E+012 | 203 | 7 | 8 | |||
| FZ2 | 4.00E+012 | 205 | 13 | 6 | |||
| FZ2 | 4.00E+012 | 206 | 3 | 0 | |||
| 222 | 2 | ||||||
| 224 | 2 | ||||||
| 230 | 8 | ||||||
| 2.00E+012 | 232 | 3 | |||||
| 233 | 7 | ||||||
| 50 | 4 | ||||||
| 51 | 2 | ||||||
| 71 | 2 | ||||||
| 99 | 9 |
| FZ | p-stop | p-spray | Wafer | BZ2, BZ3, BZ4 | BZ5, BZ6 |
|---|---|---|---|---|---|
| 244 | 5 | ||||
| 262 | 6 | ||||
| 264 | 4 | 3 | |||
| 277 | 3 | ||||
| 278 | 4 | ||||
| 281 | 4 | ||||
| 301 | 5 | ||||
| 315 | 6 |
| p-stop | p-spray | Wafer | MD |
|---|---|---|---|
| 02 | 3 | ||
| 03 | 4 | ||
| 04 | 2 | ||
| 06 | 2 | ||
| 07 | 2 | ||
| 16 | 1 | ||
| 17 | 1 | ||
| 23 | 1 | ||
| 24 | 2 | ||
| 26 | 7 | ||
| 27 | 3 | ||
| 28 | 1 | ||
| 29 | 3 |
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