p-stop | p-spray | Wafer | BZ2 | BZ3 | BZ5 | MD |
---|---|---|---|---|---|---|
01 | 1 | 1 | 1 | |||
25 | 1 | 1 | 1 | |||
31 | 1 | 2 | 1 | 1 | ||
35 | 1 | 2 | 1 | 1 |
p-stop | p-spray | Wafer | BZ5 | BZ6 | MD |
---|---|---|---|---|---|
02 | 4 | ||||
2E12 | 2E12 | 11 | 1 | ||
2E12 | 23 | 2 | 4 | ||
2E12 | 25 | 2 | |||
4E12 | 32 | 1 | 1 | 4 | |
4E12 | 33 | 1 | 1 | ||
42 | 4 | ||||
2.00E+12 | 43 | 1 | |||
44 | 4 | ||||
2E12 | 2E12 | 46 | 1 | 2 | |
8.00E+012 | 2.00E+12 | 47 | 1 |
p-stop | p-spray![]() |
Wafer | BZ1 | BZ2 | BZ3 | BZ4 | BZ5 | MD | TS |
---|---|---|---|---|---|---|---|---|---|
2E12 | 2E12 | 09 | 6 | 1 | 4 | 13 | 2 | ||
2E12 | 2E12 | 10 | 1 | ||||||
2E12 | 2E12 | 11 | 2 | 6 | 8 | 3 | 13 | 2 | |
4E12 | 22 | 4 | 1 | ||||||
1E13 | 42 | 2 | |||||||
2E13 | 46 | 2 | |||||||
2E13 | 49 | 1 |
FZ | p-stop | p-spray | Wafer | BZ2, BZ3, BZ4 | BZ5, BZ6 | MD | TS |
---|---|---|---|---|---|---|---|
FZ1 | 4.00E+012 | 52 | 2 | ||||
FZ1 | 4.00E+012 | 53 | 6 | ||||
FZ1 | 1.00E+013 | 72 | |||||
FZ1 | 1.00E+013 | 73 | 6 | ||||
FZ1 | 2.00E+012 | 104 | 4 | 4 | |||
FZ1 | 2.00E+012 | 107 | 10 | 4 | |||
FZ2 | 1.00E+013 | 146 | |||||
FZ2 | 1.00E+013 | 148 | 4 | ||||
FZ2 | 1.00E+013 | 150 | 3 | ||||
FZ2 | 2.00E+012 | 154 | 3 | ||||
FZ2 | 2.00E+012 | 157 | 10 | 7 | |||
FZ2 | 2.00E+012 | 158 | 14 | 5 | |||
FZ2 | 4.00E+012 | 181 | 7 | 2 | |||
FZ2 | 1.00E+013 | 184 | 9 | 5 | |||
FZ2 | 2.00E+012 | 193 | 14 | 3 | |||
FZ2 | 4.00E+012 | 203 | 7 | 8 | |||
FZ2 | 4.00E+012 | 205 | 13 | 6 | |||
FZ2 | 4.00E+012 | 206 | 3 | 0 | |||
222 | 2 | ||||||
224 | 2 | ||||||
230 | 8 | ||||||
2.00E+012 | 232 | 3 | |||||
233 | 7 | ||||||
50 | 4 | ||||||
51 | 2 | ||||||
71 | 2 | ||||||
99 | 9 |
FZ | p-stop | p-spray | Wafer | BZ2, BZ3, BZ4 | BZ5, BZ6 |
---|---|---|---|---|---|
244 | 5 | ||||
262 | 6 | ||||
264 | 4 | 3 | |||
277 | 3 | ||||
278 | 4 | ||||
281 | 4 | ||||
301 | 5 | ||||
315 | 6 |
p-stop | p-spray | Wafer | MD |
---|---|---|---|
02 | 3 | ||
03 | 4 | ||
04 | 2 | ||
06 | 2 | ||
07 | 2 | ||
16 | 1 | ||
17 | 1 | ||
23 | 1 | ||
24 | 2 | ||
26 | 7 | ||
27 | 3 | ||
28 | 1 | ||
29 | 3 |