R  Si Plane fit: Minimize dZ to plane

  Point X Y Z Zf dZ
   1       1.002    46.485    -0.850    -0.856     0.006
   2     -31.001    33.686    -0.929    -0.934     0.005
   3     -44.498     1.990    -0.996    -1.003     0.007
   4     -31.010   -29.710    -1.025    -1.023    -0.002
   5       1.002   -42.512    -0.956    -0.981     0.025
   6       1.002   -20.317    -0.976    -0.950    -0.026
   7       1.001    28.983    -0.879    -0.881     0.002
   8      -7.978     1.984    -0.933    -0.936     0.003
   9     -17.928     1.984    -0.969    -0.954    -0.015
  10     -27.945     1.984    -0.978    -0.973    -0.005

R  Si Plane parameters are:
    x0     -1.857
    y0     -1.405
    dd      0.924
  Mean         0.       13.

R  Si Plane fit: Minimize dN to plane

  Point X Y Z Zf dZ
   1       1.002    46.485    -0.850    -0.856     0.006
   2     -31.001    33.686    -0.929    -0.934     0.005
   3     -44.498     1.990    -0.996    -1.003     0.007
   4     -31.010   -29.710    -1.025    -1.023    -0.002
   5       1.002   -42.512    -0.956    -0.981     0.025
   6       1.002   -20.317    -0.976    -0.950    -0.026
   7       1.001    28.983    -0.879    -0.881     0.002
   8      -7.978     1.984    -0.933    -0.936     0.003
   9     -17.928     1.984    -0.969    -0.954    -0.015
  10     -27.945     1.984    -0.978    -0.973    -0.005

R  Si Plane parameters are:
    x0     -1.857
    y0     -1.405
    dd      0.924
  Mean         0.       13.
 ---------------------------------------------------------------

P  Si Plane fit: Minimize dZ to plane

  Point X Y Z Zf dZ
   1      -1.004   -41.512     1.143     1.146    -0.003
   2     -31.507   -28.020     1.165     1.134     0.031
   3     -43.505     3.236     1.168     1.174    -0.006
   4     -29.761    33.733     1.223     1.243    -0.020
   5       1.484    45.482     1.339     1.299     0.040
   6      -0.083    28.304     1.266     1.267    -0.001
   7      -0.114   -23.623     1.177     1.177     0.000
   8      -7.947     2.097     1.159     1.213    -0.054
   9     -27.923   -13.013     1.179     1.164     0.015
  10     -27.924    16.996     1.214     1.216    -0.002

P  Si Plane parameters are:
    x0     -1.147
    y0     -1.731
    dd     -1.219
  Mean         0.       25.
 ---------------------------------------------------------------

P  Si Plane fit: Minimize dN to plane

  Point X Y Z Zf dZ
   1      -1.004   -41.512     1.143     1.146    -0.003
   2     -31.507   -28.020     1.165     1.134     0.031
   3     -43.505     3.236     1.168     1.174    -0.006
   4     -29.761    33.733     1.223     1.243    -0.020
   5       1.484    45.482     1.339     1.299     0.040
   6      -0.083    28.304     1.266     1.267    -0.001
   7      -0.114   -23.623     1.177     1.177     0.000
   8      -7.947     2.097     1.159     1.213    -0.054
   9     -27.923   -13.013     1.179     1.164     0.015
  10     -27.924    16.996     1.214     1.216    -0.002

P  Si Plane parameters are:
    x0     -1.147
    y0     -1.731
    dd     -1.219
  Mean         0.       25.