R Si Plane fit: Minimize dZ to plane Point X Y Z Zf dZ 1 1.004 46.497 -1.153 -1.155 0.002 2 -30.996 33.692 -1.101 -1.112 0.011 3 -44.498 1.993 -1.078 -1.080 0.002 4 -30.995 -29.706 -1.105 -1.079 -0.026 5 1.005 -42.506 -1.106 -1.109 0.003 6 1.005 -19.984 -1.105 -1.120 0.015 7 1.005 29.017 -1.174 -1.146 -0.028 8 -8.010 2.001 -1.110 -1.122 0.012 9 -17.973 2.001 -1.110 -1.110 0.000 10 -27.975 2.000 -1.089 -1.099 0.010 R Si Plane parameters are: x0 1.136 y0 0.514 dd 1.130 Mean 0. 14. R Si Plane fit: Minimize dN to plane Point X Y Z Zf dZ 1 1.004 46.497 -1.153 -1.155 0.002 2 -30.996 33.692 -1.101 -1.112 0.011 3 -44.498 1.993 -1.078 -1.080 0.002 4 -30.995 -29.706 -1.105 -1.079 -0.026 5 1.005 -42.506 -1.106 -1.109 0.003 6 1.005 -19.984 -1.105 -1.120 0.015 7 1.005 29.017 -1.174 -1.146 -0.028 8 -8.010 2.001 -1.110 -1.122 0.012 9 -17.973 2.001 -1.110 -1.110 0.000 10 -27.975 2.000 -1.089 -1.099 0.010 R Si Plane parameters are: x0 1.136 y0 0.514 dd 1.130 Mean 0. 14. --------------------------------------------------------------- P Si Plane fit: Minimize dZ to plane Point X Y Z Zf dZ 1 -0.987 -41.498 1.039 1.044 -0.005 2 -31.491 -28.000 1.090 1.107 -0.017 3 -43.486 3.253 1.118 1.118 0.000 4 -29.742 33.753 1.062 1.069 -0.007 5 1.507 45.501 0.976 0.990 -0.014 6 0.024 28.529 1.012 1.003 0.009 7 0.493 -23.474 1.043 1.030 0.013 8 -7.975 2.013 1.028 1.036 -0.008 9 -27.987 -12.993 1.096 1.091 0.005 10 -27.987 17.018 1.097 1.074 0.023 P Si Plane parameters are: x0 2.319 y0 0.548 dd -1.019 Mean 0. 12. --------------------------------------------------------------- P Si Plane fit: Minimize dN to plane Point X Y Z Zf dZ 1 -0.987 -41.498 1.039 1.044 -0.005 2 -31.491 -28.000 1.090 1.107 -0.017 3 -43.486 3.253 1.118 1.118 0.000 4 -29.742 33.753 1.062 1.069 -0.007 5 1.507 45.501 0.976 0.990 -0.014 6 0.024 28.529 1.012 1.003 0.009 7 0.493 -23.474 1.043 1.030 0.013 8 -7.975 2.013 1.028 1.036 -0.008 9 -27.987 -12.993 1.096 1.091 0.005 10 -27.987 17.018 1.097 1.074 0.023 P Si Plane parameters are: x0 2.319 y0 0.548 dd -1.019 Mean 0. 12.